前沿物理选讲B

This course aims to systematically introduce the basic processes of microelectronic fabrication, including UV/e-beam lithography, wet/dry etching, thermal processing, thin film deposition, and device packaging. It consists of both theoretical lectures and experimental teaching. After completing this course successfully, students are expected to be able to apply what they have learned to design and fabricate micro/nano devices for the purpose of their scientific research.