高等量子力学B
（李贵新）PHY50332022秋 2021秋 2019秋2022秋 2021秋 2019秋
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| 选课类别：专业任务 | 教学语言：英文 |
| 课程类别：专业核心课 | 开课单位：材料科学与工程系 |
| 课程层次：研究生 | 获得学分：3.0 |
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This course aims to systematically introduce the basic processes of microelectronic fabrication, including UV/e-beam lithography, wet/dry etching, thermal processing, thin film deposition, and device packaging. It consists of both theoretical lectures and experimental teaching. After completing this course successfully, students are expected to be able to apply what they have learned to design and fabricate micro/nano devices for the purpose of their scientific research.
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