微观组织表征与分析

Seeing isbelieving, characterization and analysis are essential components for researches in many areas. Investigation ofmicrostructure by using electron microscopy is one of the most important and challengingpart for characterization. As theadvances of materials science, nano-tech, thin films, and precision machining,lots of attentions have been drawn to the observation and manipulation ofmicrostructure. Forinstance, the manipulation of point defects can modify the properties of two-dimensionalmaterials, the mechanical properties of materials are controlled by thedistribution and evolution of dislocations, the modification of interfacesstructure can change the property of films and increase the product quality ofadditive manufactured materials, grain boundary engineering has been used to strengthenmetals, deposition of films can increase the resistance to fracture, corrosionand irradiation. The ability for characterization and analysis of microstructure is critical for studentsplanned to work in area of design of structural materials, thin films,semiconductor, micro- and nano- devices, precision machining, and additivemanufacturing. The objectiveof this course is to acquaint students in Mechanical Engineering, MaterialsScience and Engineering, Applied Physics, Chemistry, Aerospace Engineering, andMicroelectronics Science and Engineering with fundamental theory, applicationand analysis methods of microstructure, andenhance the student’s ability of understanding and using the theory of microstructure formation andevolution to solveengineering problem. By acquainting student with the basic theory andcharacterization methods in scanning electron microscopy, focused ion beam,transmission electron microscopy, and electron back-scattering diffractionpattern analysis, improve their understanding of microstructure in differentscales, and promote their researching and working ability in the related field.After thecourse the student should be able to: Know Miller index and basics of Crystallography. Understand the basic thermodynamics used in analysis of microstructure, and the connection between energy and atomic arrangement. Describe different kinds of defects in solid and their importance in science and engineering. Know different types of interface, and give the physical meaning of the misorientation, point defects, and coherent/incoherent relation in interface. Know the fundamental methods for characterizing microstructure, atomic configuration, roughness, 3D tomography, and composition distribution of surface and interface, and understand their basic principles. Understand the interaction between electrons and solids. Known the usage of different type of signals. Know the concept and principle of Abbe diffraction limits and Bragg equation. Describe the theory of imaging and investigation methods in scanning electron microscope, focused ion beam and transmission electron microscope. Know the cons and pros of scanning electron microscope and transmission electron microscope. Understand the meaning of contrast, resolution, depth of field in microscope. Know how to make high quality images for publication. According to practice in class, understand the general requirement, editing method and typical typeset.