Lecture，3 credits, 3 hours per week. Pre-requisites：College Physics, Strength of Materials, Fluid Mechanics (or EngineeringFluid Mechanics). This course covers the fundamentals of mechanics and typicalmechanical problems in photolithography of integrated circuits or chips. Topicsinclude classic film stress, surface tension, spin coating, droplet impact, aswell as fluid dynamics of nanoimprinting, immersion lithography and extremeultraviolet (EUV) light sources. The course aims to strengthen students'understanding of the interdisciplinary nature in semiconductor industry;understand the crucial role played by mechanics in the key steps of advancedchip manufacturing processes; and help students in future research and practicesin semiconductor industry.