Microelectromechanical system design is mainly in the face of physical, electronic, mechanical and mechanical direction graduate student, as a professional and leading edge of micro-electronics specialty courses. Its purpose and task is to make students understand the working principle, structure design and semiconductor technology of micro-/nano- sensing system, to teach students critical thinking on micromachining processes, materials and design issues, to build their understanding of microscale physics, to help students master basic skills in scientific research and work in the future, and to broaden the corresponding idea.