微机电系统基础

This course introduces 1) the operation principles of typical MEMS transducers and sensors, and 2) the design and fabrication of MEMS devices. In addition to theoretical modeling, this course emphasizes the exploration of commercially viable MEMS products for applications in electronics, sensors, communications, and biomedical engineering. Topics covered in this course include various transduction and mechanical sensing mechanisms (capacitive, piezoelectric, piezoresistive, magnetic, and thermal), and MEMS fabrication technologies (silicon bulk and surface micromachining, planar thin-film processing, wafer bonding, etching, and lithography). Computer-aided design of MEMS devices are discussed through MEMS layout and multi-physics simulation software.