Micro electromechanical systems (MEMS) and Nano electro mechanical systems (NEMS) areemerging technologies with increasing applications in handheld devices andminiature distributed systems. This course introduces1) the operationprinciples of typical MEMS/NEMS transducers and sensors, and 2) the design andfabrication of MEMS/NEMS devices. In addition to theoretical modelling, thiscourse emphasizes on the exploration of commercially viable MEMS/NEMS productsfor applications in electronics, sensors, communications, and biomedicalengineering.