超大规模集成电路工艺原理

This course helpsstudents establish a basic understanding of the front- and back-end processingin modern VLSI technology. The lectures discuss the fundamentals; the textbookand reference materials provide amplification, as well as direction for furtherexploration; and the problems and projects enhance topic understanding, andallow students to apply the knowledge gained from lectures and texts to solvepractical problems. The knowledge acquired in this course will allow thestudent to understand the advantages and constrains of each fabricationtechnology. Students will be able to design practical fabrication strategiesand trouble-shoot manufacturing problems for various types of semiconductordevices.